Reaction mechanism of silicon Cat-CVD

Thermochemistry and Kinetics of Silicon Hydride Cluster Formation during Thermal Decomposition of Silane

Mark T. Swihart, Steven L. Girshick · The Journal of Physical Chemistry B · 1998 · 175 citations

Natural Sciences, Chemical Engineering, Chemistry +17

Catalytic decomposition of SiH4 on a hot filament

Shinya Tange, Keisuke Inoue, Kenichi Tonokura et al. · Thin Solid Films · 2001 · 74 citations

Natural Sciences, Chemical Engineering, Chemistry +12

Direct kinetic studies of SiH3+SiH3, H, CCl4, SiD4, Si2H6, and C3H6 by tunable infrared diode laser spectroscopy

S. K. Loh, Joseph M. Jasinski · The Journal of Chemical Physics · 1991 · 72 citations

Natural Sciences, Chemistry, Materials Science +15

Abstraction of hydrogen by SiH3 from hydrogen-terminated Si(001)-(2×1) surfaces

Shyam Ramalingam, Dimitrios Maroudas, Eray S. Aydil et al. · Surface Science · 1998 · 64 citations

Natural Sciences, Chemistry, Materials Science +12

Some mechanistic problems in the kinetic modeling of monosilane pyrolysis

Rosa Becerra, Robin Walsh · The Journal of Physical Chemistry · 1992 · 59 citations

Natural Sciences, Chemical Engineering, Chemistry +15