Nuclear Instruments and Methods · 1980 · 33 citations · 9 references
Natural SciencesChemistryPhysicsSpectroscopySurface ChemistrySurface ScienceAtomic IonizationIonization ProcessesIonization TechniquesPlasma-surface InteractionsSurface ChargeSurface EnergeticsExcited StatesIon-atom CollisionsIon-surface InteractionsIonization Yield
9
The sputtering process and sputtered ion emission
Peter Williams · Surface Science · 1979 · 332 citations
Natural Sciences, Materials Engineering, Materials Science +8
Similarities in photon and ion emissions induced by sputtering
G. Blaise · Surface Science · 1976 · 73 citations