A simple optical device for generating square flat-top intensity irradiation from a gaussian laser beam

Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser

Yoshiyuki Kawamura, K. Toyoda, S. Namba · Applied Physics Letters · 1982 · 304 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Localized laser etching of compound semiconductors in aqueous solution

Richard M. Osgood, Antonio Sanchez‐Rubio, D. J. Ehrlich et al. · Applied Physics Letters · 1982 · 99 citations

Engineering, Materials Engineering, Materials Science +17

Deep uv submicron lithography by using a pulsed high-power excimer laser

Yoshiyuki Kawamura, K. Toyoda, S. Namba · Journal of Applied Physics · 1982 · 55 citations

Engineering, Materials Engineering, Materials Science +16

Optics and laser technology

Optics & Laser Technology · 1980 · 30 citations

Engineering, Physics, Optics +11

Technique for generating focal-plane flattop laser-beam profiles

Wilfrid B. Veldkamp · Review of Scientific Instruments · 1982 · 17 citations

Natural Sciences, Physics, Optical Materials +14