Modelling on plasma immersion implantation of trenches

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

Engineering, Materials Science, Physics +16

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Energy dependence of the ion-induced sputtering yields of monatomic solids

N. Matsunami, Yasunori Yamamura, Yukikazu Itikawa et al. · Atomic Data and Nuclear Data Tables · 1984 · 801 citations

Natural Sciences, Materials Science, Physics +7

Inherent possibilities and restrictions of plasma immersion ion implantation systems

S. Mändl, J. Brutscher, R. Günzel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 60 citations

Natural Sciences, Physics, Plasma Physics +16

Ion focusing by an expanding, two-dimensional plasma sheath

T. E. Sheridan · Applied Physics Letters · 1996 · 59 citations

Natural Sciences, Nuclear Engineering, Plasma Physics +10