Material characterization of high Sn-content, compressively-strained GeSn epitaxial films after rapid thermal processing - Concepedia

Concepedia

Publication | Closed Access

Material characterization of high Sn-content, compressively-strained GeSn epitaxial films after rapid thermal processing

78

Citations

14

References

2012

Year

Robert Chen, Yi‐Chiau Huang, Suyog Gupta, A. C. Lin, Errol Sanchez, Yihwan Kim, Krishna C. Saraswat, T. I. Kamins, James S. Harris

Journal of Crystal Growth

Materials ScienceMaterials EngineeringEngineeringMaterial CharacterizationApplied PhysicsSemiconductor MaterialThin FilmsMolecular Beam EpitaxyEpitaxial GrowthThin Film ProcessingRapid Thermal Processing

References

	Year	Citations

Page 1

Page 1