An experimental investigation of angular resolved energy distributions of atoms sputtered from evaporated aluminum films

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

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II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

Natural Sciences, Materials Science, Physics +15

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

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Principles and Applications of Resonance Ionization Spectroscopy

G. S. Hurst, Marvin G. Payne · 1988 · 132 citations

Natural Sciences, Chemistry, Physics +10

Sputtered neutral silver clusters up to Ag18

A. Wucher, Michael Wahl, H. Oechsner · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 107 citations

Natural Sciences, Chemistry, Materials Science +6