Optimization of the performance of a thin film permalloy magnetoresistive sensor

Abstract

Basic factors influencing the sensitivity of resistance sensors of magnetic field have been determined. The relation of these factors and sensor geometric form, taking into account the field non-uniformity, has been investigated numerically and experimentally. After introduction of new mathematical model of a sensor, the optimization for the two modes - for limited dissipated power and for limited supply voltage has been carried out. It has been concluded that for a given film thickness and a gap between the sensor paths (depending on the manufacturing technology) there exists an optimal value of a path width and an angle between the path and anisotropy axis. The sensor sensitivity reaches maximum in this optimum point.