Concepedia

Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

Yongzhong Jin, Wei Wu, Li Li, Jian Chen, Jingyu Zhang, Jun Fu

Applied Surface Science · 2008 · 75 citations · 19 references

DOI

Concepts

References

19

Atomic Force Microscope

G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text

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Effect of RF power on optical and electrical properties of ZnO thin film by magnetron sputtering

Yang Lu, Wen-Shyang Hwang, W. Y. Liu et al. · Materials Chemistry and Physics · 2001 · 179 citations

, , +17

Void formation during film growth: A molecular dynamics simulation study

Richard W. Smith, David J. Srolovitz · Journal of Applied Physics · 1996 · 147 citations · Full text

, , +15

A two-dimensional molecular dynamics simulation of thin film growth by oblique deposition

D. Liang, Richard W. Smith, David J. Srolovitz · Journal of Applied Physics · 1996 · 106 citations · Full text

, , +16

Effects of RF power variation on properties of ZnO thin films and electrical properties of p–n homojunction

Kyu-Hyun Bang, Min-Chang Jeong, Jae-Min Myoung · Journal of Crystal Growth · 2003 · 100 citations

, , +17