Peculiarities of the formation of planar micro-optic elements on porous glass substrates under the effect of laser radiation followed by sintering

Abstract

The theoretical and practical approaches to the formation of micro-optic elements (MOE) for the integrated optical communication on substrates made of different materials, including silicate glasses, have been reviewed. The applicability of high-silica porous glasses (PG) fabricated by a homogeneous acid leaching of two-phase alkali borosilicate glasses as basic matrices for laser formation of MOE of different types (microlenses and microchannels) has been discussed. It has been demonstrated that sintering laser-modified PGs at temperatures ensuring the collapse of the pore can be used to stabilize MOE optical properties. The results of choosing the time-temperature mode for sintering PG substrates with a planar MOE-strip waveguide (SW) providing the SW fixation on a completely sintered substrate were presented.