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S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Natural Sciences, Chemical Engineering, Chemistry +17

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Application of the air-bridge microheater to gas detection

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Structural design and characteristics of a thermally isolated, sensitivity-enhanced, bulk-micromachined, silicon flow sensor

Timothy M Betzner, John R. Doty, Amal M A Hamad et al. · Journal of Micromechanics and Microengineering · 1996 · 22 citations

Engineering, Materials Engineering, Materials Science +17