Publication | Closed Access
In situ detection of rearrangement processes during electron beam annealing of ion implanted InP
29
Citations
3
References
1993
Year
Materials ScienceIon ImplantationEngineeringElectron MicroscopyCrystalline DefectsApplied PhysicsElectron Beam AnnealingIon BeamIon EmissionMicroelectronicsSitu DetectionRearrangement Processes
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