Optical Materials · 2003 · 53 citations · 16 references
Materials ScienceSubmicrometer ScaleLithium NiobateEngineeringElectron-beam LithographyBeam LithographyNanotechnologyApplied PhysicsNano Electro Mechanical SystemMicroanalysisElectron Beam BombardmentNanometrologyMicroelectronics
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