Sensors and Actuators B Chemical · 2002 · 63 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySensorsThin FilmsChemical SensorsGas SensorsSensor MaterialsSurface PhysicsThin-film DepositionThin-film MaterialsSolid-state Chemical SensorsSolid-state SensingThin Oxide FilmsThin-film Sensor MaterialsThin-film Sensors
17