Solid State Ionics · 2010 · 25 citations · 7 references
EngineeringChemical EngineeringChemistryAnalytical ChemistryMicroelectromechanical SystemsSensorsChemical SensorsGas SensorsMems CharacterizationMems MaterialsMems SensorsNitrogen OxidesGas SensingGas Sensor FabricationNitrogen Oxides Measurement
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Thin-film gas sensors based on semiconducting metal oxides
H. Meixner, J. Gerblinger, U. Lampe et al. · Sensors and Actuators B Chemical · 1995 · 218 citations
Natural Sciences, Materials Engineering, Materials Science +14