Applied Physics A · 1999 · 33 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface ScienceSurface CharacterizationSurface Chemistry Of SolidsSurface ModificationSurface PassivationSurface PhysicsSurface PreparationCvd CoatingsInorganic Passivation LayersSemiconductor Surface PreparationSurface Defect Characterization