Strain studies in LPCVD polysilicon for surface micromachined devices

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +17

Integrated fabrication of polysilicon mechanisms

Mehran Mehregany, K.J. Gabriel, William S. Trimmer · IEEE Transactions on Electron Devices · 1988 · 226 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Engineering, Materials Science, Mechanical Engineering +17

Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films

T. I. Kamins, Mohammad M. Mandurah, Krishna C. Saraswat · Journal of The Electrochemical Society · 1978 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +16