Publication | Closed Access
Design, modeling and testing of a unidirectional MEMS ring thermal actuator
14
Citations
19
References
2007
Year
Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringThermal ManagementMechanical SystemsThermal ActuatorUnidirectional MemsActuationThermal ModelingThermodynamicsHeat TransferMicroactuatorThermal EngineeringMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1