Concepedia

XPS and XTEM study of AlN formation by N+2 implantation of aluminium

W. Österle, I. Dörfel, I. Urban, T. Reier, J.W. Schultze

Surface and Coatings Technology · 1998 · 39 citations · 9 references

DOI

Concepts

References

9

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

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Quantitative evaluation of AES‐depth profiles of thin anodic oxide films (Ta <sub>2</sub> O <sub>5</sub> /Ta, Nb <sub>2</sub> O <sub>5</sub> /Nb)

J. M. Sanz, S. Hofmann · Surface and Interface Analysis · 1983 · 72 citations

, , +15

Low‐energy implantation and sputtering of TiO <sub>2</sub> by nitrogen and argon and the electrochemical reoxidation

M. Wolff, J.W. Schultze, Hans‐Henning Strehblow · Surface and Interface Analysis · 1991 · 56 citations

, , +17

Nanohardness and transmission electron microscopy study of nitrogen-implanted aluminium

Stéphane Lucas, J. Chevallier · Surface and Coatings Technology · 1994 · 29 citations

, , +12

Electrochemical and surface analytical characterization of radiation effects after N2+ implantation into Al and Al2O3

S. Simson, T. Reier, J.W. Schultze et al. · Surface and Coatings Technology · 1996 · 23 citations

, , +16