Publication | Closed Access
Interfacial reaction between silicon nitride and aluminium
24
Citations
6
References
1987
Year
Materials ScienceAluminium NitrideEngineeringCrystalline DefectsMaterial PropertySilicon Nitride/aluminium InterfaceSurface ScienceApplied PhysicsMaterials CharacterizationPure AluminiumMetallurgical InteractionSilicon On InsulatorMicrostructureSilicon Nitride SideSilicon Nitride
Abstract The microstructure of a silicon nitride/aluminium interface has been identified by analytical transmission electron microscopy. HIPed silicon nitride without any additive was bonded by pure aluminium at 800°C for 15 min. A thin (∼ 5000 Å) reaction layer was recognized at the interface. It consisted of two regions. One an amorphous layer facing the aluminium; it contained aluminium, silicon and oxygen. The other was on the silicon nitride side and consisted of fine particles which were less than 100 Å in diameter. These particles were considered to have β'-sialon type structure.
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