Growth and equilibrium structures in the epitaxy of Si on Si(001)

Y. W. Mo, B. S. Swartzentruber, R. Kariotis, M. B. Webb, M. G. Lagally

Physical Review Letters · 1989 · 322 citations · 10 references

Concepts

Abstract

Scanning-tunneling-microscopy measurements of submonolayer growth of Si on Si(001) show anisotropic island shapes. From coarsening experiments it is determined that these shapes are a consequence of the growth kinetics. They can be explained by a lateral accommodation coefficient for atoms arriving at the edge of islands that differs by an order of magnitude at the ends and at the sides of dimer rows.

References

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