Publication | Closed Access
Growth and equilibrium structures in the epitaxy of Si on Si(001)
320
Citations
10
References
1989
Year
EngineeringEquilibrium StructuresSilicon On InsulatorSubmonolayer GrowthLateral Accommodation CoefficientTunneling MicroscopyNanoelectronicsSiliceneMolecular Beam EpitaxyEpitaxial GrowthMaterials EngineeringMaterials SciencePhysicsSemiconductor MaterialSemiconductor Device FabricationMicroelectronicsSurface ScienceApplied PhysicsDimer Rows
Scanning-tunneling-microscopy measurements of submonolayer growth of Si on Si(001) show anisotropic island shapes. From coarsening experiments it is determined that these shapes are a consequence of the growth kinetics. They can be explained by a lateral accommodation coefficient for atoms arriving at the edge of islands that differs by an order of magnitude at the ends and at the sides of dimer rows.
| Year | Citations | |
|---|---|---|
Page 1
Page 1