Plasma chemistry model of DC magnetron reactive sputtering in Ar O2 gas mixtures

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Engineering, Transmission Sputtering, Target Fabrication +21

Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization

Donald Rapp, Paula Englander‐Golden · The Journal of Chemical Physics · 1965 · 2K citations

Positive Ionization, Engineering, Atomic Emission Spectroscopy +17

Rate constants and quenching mechanisms for the metastable states of argon, krypton, and xenon

Jose E. Velazco, J. H. Kolts, D. W. Setser · The Journal of Chemical Physics · 1978 · 439 citations

Localized Excited State, Same Reagent, Radiative Transfer +15

Cross Sections for Collisions of Electrons and Photons with Oxygen Molecules

Yukikazu Itikawa, A. Ichimura, Ken Onda et al. · Journal of Physical and Chemical Reference Data · 1989 · 413 citations

Oxygen Molecule, Engineering, Electron Diffraction +17

Updated Excitation and Ionization Cross Sections for Electron Impact on Atomic Oxygen

Russ R. Laher, Forrest R. Gilmore · Journal of Physical and Chemical Reference Data · 1990 · 296 citations

Engineering, Atomic Emission Spectroscopy, Chemistry +16