Concepedia

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Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings

DOI

184

Citations

15

References

1993

Year

Xiaoyu Chu, S. A. Barnett, Ming‐Show Wong, W.D. Sproul
Surface and Coatings Technology

References

YearCitations

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