Publication | Closed Access
MOVPE-based in situ etching of In(GaAs)P/InP using tertiarybutylchloride
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Citations
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References
2000
Year
Materials EngineeringMaterials ScienceEngineeringSitu EtchingApplied PhysicsSemiconductor Device FabricationMicroelectronicsPlasma EtchingOptoelectronicsCompound Semiconductor
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