Sensors and Actuators A Physical · 2012 · 28 citations · 8 references
EngineeringElectrical EngineeringMaterials ScienceOpticsPhotonicsSensorsDisplacement MeasurementDisplacement SensorsOptical InstrumentationOptical MetrologyOptical SensingOptical SensorsDisplacementDisplacement SensingMicrometer-scale Displacement MeasurementNanometer-scale Displacement MeasurementNanometer-scale Position DetectionOptical Displacement MeasurementOptical Displacement Sensors
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A new capacitive displacement sensor with high accuracy and long-range
Moojin Kim, Wonkyu Moon, Eui-Sung Yoon et al. · Sensors and Actuators A Physical · 2006 · 101 citations