High temperature plasma based ionic implantation of titanium alloys and silicon

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Ion-assisted surface modification by plasma immersion ion implantation

G.A. Collins, R. Hutchings, K. T. Short et al. · Surface and Coatings Technology · 1998 · 86 citations

Natural Sciences, Materials Science, Physics +14

Transport number measurements during plasma anodization of Si, GaAs, and ZrSi2

J. Perrière, J. Siejka, N. Rémili et al. · Journal of Applied Physics · 1986 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +14

New line of high voltage high current pulse generators for plasma-based ion implantation

O. Maulat, Michel Roché, O. Lesaint et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 23 citations

Natural Sciences, Electrical Engineering, Physics +12

Ion nitriding of aluminium – experimental investigation of the thermal transport

T Telbizova, S. Parascandola, F. Prokert et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 19 citations

Engineering, Materials Engineering, Materials Science +16