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Synthesis of Ti–Al–Si–N nanocomposite films using liquid injection PECVD from alkoxide precursors

Materials EngineeringMaterials ScienceEngineeringLiquid Injection PecvdChemistryThin FilmsMaterial PreparationAlkoxide PrecursorsChemical Vapor DepositionPowder SynthesisTi–al–si–n Nanocomposite Films