Concepedia

Influence of oxygen plasma treatment on boron carbon nitride film composition

Hidemitsu Aoki, Takuro Masuzumi, Daisuke Watanabe, M.K. Mazumder, Hiroshi Sota, Chiharu Kimura, Takashi Sugino

Applied Surface Science · 2008 · 14 citations · 12 references

DOI

Concepts

References

12

CRC Handbook of Chemistry and Physics

Devendra Leena P · Journal of Molecular Structure · 1992 · 9.4K citations

, , +12

Characterization and Field Emission of Sulfur-Doped Boron Nitride Synthesized by Plasma-Assisted Chemical Vapor Deposition

Takashi Sugino, Kazuhiko Tanioka, Seiji Kawasaki et al. · Japanese Journal of Applied Physics · 1997 · 121 citations

, , +17

Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering

Zhongfu Zhou, I. Bello, M.K. Lei et al. · Surface and Coatings Technology · 2000 · 115 citations

, , +8

Bonding characteristics of DC magnetron sputtered B–C–N thin films investigated by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy

Sandra E. Rodil, Petra Reinke, M. G. Garnier et al. · Thin Solid Films · 2004 · 100 citations

, , +10

Boron carbonitride films deposited by pulsed laser ablation

A. Perrone, Anna Paola Caricato, A. Luches et al. · Applied Surface Science · 1998 · 93 citations

, , +10