Concepedia

The Influence of Foreign Atoms on the early Stages of SiC Growth on (111)Si

Joerg Pezoldt, György Vida, M. Rouhani Laridjani, M. Avérous, T. Wöhner, J. A. Schaefer, Thomas Stauden, G. Ecke, R. Pieterwas, Lothar Spieß

Materials science forum · 2000 · 13 citations · 0 references

Concepts

Materials ScienceMaterials EngineeringEngineeringEarly StagesPhysicsApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorForeign AtomsCarbideSic Growth