A Novel Generation Method of Dielectric Barrier Discharge and Ozone Production Using a Piezoelectric Transformer

Abstract

A novel generation method of a dielectric barrier discharge (DBD) using a piezoelectric transformer (PT) is proposed. Spatio-temporal variations of microdischarges were investigated and discussed on the basis of the observations using a charge-coupled device (CCD) camera. As an example of a practical application of the DBD to a plasma reactor, an ozonizer using the PT was developed and ozone productions were performed in air and oxygen. Maximum ozone concentrations of 3.38 and 20.3 g/Nm 3 were obtained in air and oxygen, respectively. The ozonizer can be designed in a compact configuration and driven with low applied voltages because the PT serves as both a high-voltage generator and a discharge electrode.