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Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena

Electrostatic MicropumpElectrical EngineeringElectrohydrodynamicsEngineeringMechanicsMechanical EngineeringDynamic SimulationMechanical SystemsMicroactuatorMicropositioningHysteresisMicrofluidicsMicro-electromechanical SystemHysteresis Phenomena