Concepedia

Publication | Closed Access

Formation of buried and surface CoSi2 layers by ion implantation

DOI

29

Citations

7

References

1990

Year

Ming Wu, A. Vantomme, H. Pattyn, G. Langouche, Karen Maex, Jan Vanhellemont, J. Vanacken, H. Vloeberghs, Y. Bruynseraede
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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