Geometric structure of thin SiOxNy films on Si(100) - Concepedia

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Geometric structure of thin SiOxNy films on Si(100)

24

Citations

13

References

1998

Year

Klaus Behrens, Ernst‐Dieter Klinkenberg, J. Finster, K.‐H. Meiwes‐Broer

Surface Science

Materials ScienceMaterials EngineeringEngineeringThin Sioxny FilmsSurface ScienceApplied PhysicsSiliceneThin FilmsSilicon On InsulatorThin Film Processing

References

	Year	Citations

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