Concepedia

Pac studies of ion implanted silicon

D. Forkel, F. Meyer, W. Witthuhn, H. Wolf, M. Deicher, M. Uhrmacher

Hyperfine Interactions · 1987 · 13 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesImplant MaterialsImplant TechnologyIon ImplantationSilicon MaterialsIon Implantation EffectsSilicon DopingSilicon Physics