Concepedia

A new modular multichamber plasma enhanced chemical vapor deposition system

A. Madan, P. Rava, R.E.I. Schropp, B. von Roedern

Applied Surface Science · 1993 · 71 citations · 0 references

Concepts

Natural SciencesMaterials SciencePhysicsInterface SciencePlasma PhysicsChemical Vapor DepositionHigh-temperature PlasmasPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsThin-film DepositionChemical Vapor Deposition CoatingsChemical Vapor Deposition MaterialsPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced Deposition