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Intrinsic stress generation and relaxation of plasma-enhanced chemical vapor deposited oxide during deposition and subsequent thermal cycling

Materials ScienceEngineeringSubsequent Thermal CyclingSurface ScienceApplied PhysicsPlasma-enhanced Chemical VaporThermodynamicsChemical Vapor DepositionChemical DepositionGas Discharge PlasmaIntrinsic Stress GenerationPlasma Processing