Low-energy electron attachment to SF6. I. Kinetic modeling of nondissociative attachment

Abstract

Low-energy electron-molecule collisions are analyzed by kinetic modeling within the framework of statistical unimolecular rate theory. Nondissociative electron attachment to SF(6) is used to illustrate the approach. An internally consistent representation is provided for attachment cross sections and rate coefficients in relation to detachment lifetimes, and both thermal and specific rate coefficients for detachment. By inspecting experimental data, the contributions of intramolecular vibrational redistribution and vibrationally inelastic collisions can be characterized quantitatively. This allows for a prediction of attachment rate coefficients as a function of electron and gas temperature as well as gas pressure over wide ranges of conditions. The importance of carefully controlling all experimental parameters, including the carrier gas pressure, is illustrated. The kinetic modeling in Part II of this series is extended to dissociative electron attachment to SF(6).