Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope

Abstract

The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies.