Concepedia

Publication | Closed Access

Low power ion-beam-assisted etching of indium phosphide

DOI

31

Citations

15

References

1985

Year

N. L. DeMeo, J.P. Donnelly, F.J. O’Donnell, M. W. Geis, Kieran O'Connor
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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