Publication | Closed Access
Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels
26
Citations
8
References
1999
Year
EngineeringMicromachined Fluidic ChannelsMicrofabricationApplied PhysicsThin FilmsAmorphous SolidMicrofluidicsPlasma ProcessingCarbideMicroelectronics
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