<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> deposition monitoring for solar film production by roll coating

Abstract

Real-time measurement of critical coating properties is a necessity for commercial success in large-scale roll coating. Both sheet resistance and optical measurements are used in modern sputter roll coating plants. This presentation will introduce sputter roll coating and discuss in situ film monitoring in that context. Some of the difficulties in interpreting the measurements and in relating them to product specifications will be addressed.