New High-Phase-Velocity Leaky Surface Acoustic Wave Mode on LiTaO₃ and LiNbO₃

Abstract

A new high-phase-velocity leaky surface acoustic wave (SAW) mode, which was predicted by computer simulation, was confirmed experimentally to exist on both LiTaO 3 and LiNbO 3 . The Euler angles of the propagation direction are (90°, 90°, 31°) on LiTaO 3 and (90°, 90°, 37°) on LiNbO 3 . One-port SAW resonators were produced to confirm these modes. The phase velocity of the mode on LiTaO 3 (90°, 90°, 31°) is 6250 m/s, and that on LiNbO 3 (90°, 90°, 37°) is 7170 m/s. The temperature coefficient of the resonance frequency on LiTaO 3 (90°, 90°, 31°) is -30 ppm/°C, and that on LiNbO 3 (90°, 90°, 37°) is -30 ppm/°C.