Plasma etching of different polydimethylsiloxane elastomers, effects from process parameters and elastomer composition

Characterization of Polydimethylsiloxane (PDMS) Properties for Biomedical Micro/Nanosystems

Álvaro Mata, Aaron J. Fleischman, Shuvo Roy · Biomedical Microdevices · 2005 · 1.3K citations · Full text

Engineering, Bioengineering, Biomedical Engineering +12

Mechanical properties of silicones for MEMS

Florian Schneider, Thomas Fellner, Jürgen Wilde et al. · Journal of Micromechanics and Microengineering · 2008 · 428 citations

Engineering, Materials Science, Mechanical Engineering +16

Dry etching of polydimethylsiloxane for microfluidic systems

John Garra, Teng Long, J. F. Currie et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 183 citations

Engineering, Materials Engineering, Materials Science +17

The effect of fluorine-based plasma treatment on morphology and chemical surface composition of biocompatible silicone elastomer

Dariusz Szmigiel, K. Domański, Piotr Prokaryn et al. · Applied Surface Science · 2006 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +15

Deep etching of biocompatible silicone rubber

Dariusz Szmigiel, K. Domański, Piotr Prokaryn et al. · Microelectronic Engineering · 2006 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +12