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In-Situ Metrology And Machine Based Interferometry For Shape Determination
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References
1987
Year
EngineeringMeasurementOptical TestingMechanical EngineeringInterferometryOptical MetrologyShape AnalysisSitu Metrology FacilityCalibrationIn-situ MetrologyGeometrical AccuracyInstrumentationGraded-reflectivity MirrorsGeometric ModelingMaterials ScienceUltra-precision Machine/metrology FacilityLength MetrologySxt MirrorsFreeform OpticQuality MetricsOptical Components3D PrintingNatural SciencesX-ray OpticMetrology
A brief description is given of the successful development of a large computer controlled machine for diamond turning aluminium alloy X-ray mirror substrates (1.5 m (60 in.) dia., 600 mm (24 in.) axial length). The in situ metrology facility for axial profile, roundness and diameter measurement is described, together with the technique for automatic programming of the final tool path to compensate for errors of workpiece deflection, tool setting and edge radius, etc.. Examples are based on the ROSAT and SXT mirrors for which the axial and radial location/mounting surfaces are produced with precise reference to the reflecting surfaces. Adaptation of this type of ultra-precision machine/metrology facility to the production of other types of optical components is also discussed.