Journal of Non-Crystalline Solids · 1985 · 53 citations · 6 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMaterials PhysicsSolid State PhysicsSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsElectronic Density Of StatesSilicon Thin FilmsThin-film Semiconductors
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Reactive plasma deposited SixCyHz films
Y. Catherine, G. Turban · Thin Solid Films · 1979 · 119 citations
Optical properties and hydrogen concentration in amorphous silicon
J. Perrin, I. Solomon, B. Bourdon et al. · Thin Solid Films · 1979 · 74 citations