Influence of oxygen content on structure and hardness of Cr–N–O thin films prepared by pulsed laser deposition

Tsuneo Suzuki, Jun Inoue, Hajime Saito, Makoto Hirai, Hisayuki Suematsu, Weihua Jiang, Kiyoshi Yatsui

Thin Solid Films · 2006 · 54 citations · 13 references

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References

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