Publication | Closed Access
Microstructure evolution of gold thin films under spherical indentation for micro switch contact applications
15
Citations
12
References
2011
Year
Materials ScienceEngineeringMicrofabricationNanotechnologyGold Thin FilmsSurface ScienceApplied PhysicsSpherical IndentationMicrostructure EvolutionThin FilmsNanolithography MethodThin Film Processing
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