Concepedia
Nuclear Instruments and Methods · 1975 · 57 citations · 1 references
EngineeringPhysicsSemiconductor DevicesMask DesignSputter DepositionSputteringSputtering Processes
1
A close to universal negative ion source
R. Middleton, Charles T. Adams · Nuclear Instruments and Methods · 1974 · 147 citations
Natural Sciences, Physics, Nuclear Physics +7