Synthesis of AlN by reactive sputtering - Concepedia

Concepedia

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Synthesis of AlN by reactive sputtering

14

Citations

21

References

1997

Year

F. Randriamora, J.C. Bruyère, A. Deneuville

Materials Science and Engineering B

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSurface ScienceCatalysisChemistryReactive SputteringSynthesis MethodAnodizing

References

	Year	Citations

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