Concepedia

Large-area YBa2Cu3O7−δ thin films on sapphire for microwave applications

Ben Cole, G.-C. Liang, N. Newman, K. Char, G. Zaharchuk, J. Martens

Applied Physics Letters · 1992 · 105 citations · 10 references

DOI

Concepts

Abstract

We have deposited YBa2Cu3O7−δ(YBCO) films with low microwave surface resistance (Rs) on 5-cm-diam, oxide-buffered sapphire substrates by planar magnetron sputtering. MgO buffer layers are used on M-plane (101̄0) sapphire, and R-plane (11̄02) sapphire is buffered by CeO2. Rs values of 450–620 μΩ at 77 K and 10 GHz were measured across an entire 5-cm diam YBCO film on M-plane sapphire. For YBCO on R-plane sapphire, Rs values at 77 K and 10 GHz were 950 μΩ for a 5-cm-diam wafer and 700 μΩ for 1×1 cm2 samples.

References

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