Electronics and Power · 1979 · 34 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationSemiconductor Device MaterialsSemiconductor Thin FilmsDevice FabricationFabrication TechniquesSemiconductor Technology